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Perkin-Elmer 851-8552-004 Processor PCB Card Rev. A SVG ASML 90S Used Working Part No: AS02180G-4Perkin Elmer 851 8552 004 Processor PCB Card Rev. A SVG ASML 90S Used Working Inventory # A 12441 This Perkin Elmer 851 8552 004 is used working surplus. The physical condition is good, but there are signs of previous use and handling. Removed from a ASML SVG Silicon Valley Group 90S DUV Lithography System. Specifications Part No: 851 8552 004 Model No: A5104 Rev. A Removed from a ASML SVG Silicon Valley Group 90S DUV Lithography System Sale Details